Frequency dependence of the lifetime of a surface micromachined microengine driving a load

Citation
Dm. Tanner et al., Frequency dependence of the lifetime of a surface micromachined microengine driving a load, MICROEL REL, 39(3), 1999, pp. 401-414
Citations number
19
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
MICROELECTRONICS RELIABILITY
ISSN journal
00262714 → ACNP
Volume
39
Issue
3
Year of publication
1999
Pages
401 - 414
Database
ISI
SICI code
0026-2714(199903)39:3<401:FDOTLO>2.0.ZU;2-1
Abstract
Experiments have been performed on surface micromachined microengines drivi ng load gears to determine the rotational frequency dependence on median cy cles to failure. A sample of 272 microengines, each driving a load, was str essed at eight different frequencies. Frequency dependence was observed and a model was developed based on fundamental wear mechanisms and forces exhi bited in resonant mechanical systems. Stressing loaded microengines caused observable wear in the rotating joints and in a few instances led to fractu re of the pin joint in the drive gear. (C) 1999 Elsevier Science Ltd. All r ights reserved.