Modeling and spectroscopic investigations on the evaporation of zirconia in a thermal rf plasma

Citation
P. Buchner et al., Modeling and spectroscopic investigations on the evaporation of zirconia in a thermal rf plasma, PLASMA CHEM, 19(3), 1999, pp. 341-362
Citations number
31
Categorie Soggetti
Physical Chemistry/Chemical Physics","Chemical Engineering
Journal title
PLASMA CHEMISTRY AND PLASMA PROCESSING
ISSN journal
02724324 → ACNP
Volume
19
Issue
3
Year of publication
1999
Pages
341 - 362
Database
ISI
SICI code
0272-4324(199909)19:3<341:MASIOT>2.0.ZU;2-O
Abstract
The evaporation process of zirconia powders injected in a thermal rf plasma is investigated. Both model calculations and optical emission spectroscopy are used to study the evaporation behavior. Gas temperatures and velocity distributions are determined numerically from conservation laws and Maxwell equations. The influence of plasma and particle parameters on the thermal history of entrained particles is discussed. Asymmetric Abel inversion is a pplied to detect asymmetric emission profiles in the plasma source. Spectro scopic measurements reveal that evaporated zirconium is concentrated near t he axis of the plasma. Numerical calculations show that line-integrated emi ssion profiles can be used to distinguish the cases of complete and incompl ete evaporation. Axial emission profiles confirm that the evaporation zone is shifted upstream of the plasma when smaller precursor particles are used .