Advanced spatially resolved EELS in the STEM

Authors
Batson, PE
Citation
Pe. Batson, Advanced spatially resolved EELS in the STEM, ULTRAMICROS, 78(1-4), 1999, pp. 33-42
Citations number
24
Categorie Soggetti
Multidisciplinary,"Spectroscopy /Instrumentation/Analytical Sciences
Journal title
ULTRAMICROSCOPY
ISSN journal
03043991 → ACNP
Volume
78
Issue
1-4
Year of publication
1999
Pages
33 - 42
Database
ISI
SICI code
0304-3991(199906)78:1-4<33:ASREIT>2.0.ZU;2-5
Abstract
Commercial availability of high spatial resolution STEM instruments is lead ing to widespread use of EELS and ADF imaging techniques. Future instrument s will need to greatly improve levels of stability and accuracy to allow us e of these techniques with atomic level precision. I review some experiment al results which suggest an urgent need for a 0.1 nm diameter probe with a usable EELS spectral resolution of about 100 meV. (C) 1999 Published by Els evier Science B.V. All rights reserved.