We have fabricated GaN-based light-emitting diodes using transparent indium
tin oxide (ITO) p contacts. ITO-contacted devices required an additional 2
V to drive 10 mA, as compared to similar devices with metal contacts. Howe
ver, ITO has lower optical absorption at 420 nm (alpha = 664 cm(-1)) than c
ommonly used thin metal films (alpha = 3 x 10(5) cm(-1)). Uniform luminesce
nce was observed in ITO-contacted devices, indicating effective hole inject
ion and current spreading. (C) 1999 American Institute of Physics. [S0003-6
951(99)01626-5].