A novel SiH4 production method using molten salt electrochemical process ha
s been proposed. In order to examine the possibility of the method, a poten
tial-pH(-) diagram was constructed for the Si-H system in a LiCl-KCl eutect
ic melt. The electrode behavior of a single crystal Si electrode was invest
igated by cyclic voltammetry in molten LiCl-KCl-LiH(5 mol %) systems at 673
K. The result showed that a passivation film was formed on the electrode b
y anodic polarization and that further polarization leads to breakdown of t
he passivation film. From the IR absorption spectroscopy of the evolved gas
, SiH4 production was confirmed. Fluoride ion addition to the melt was foun
d to be effective for promoting the SiH4 production. The current efficiency
for the SiH4 evolution was improved to about 20 % by using a lower LiH(0.8
mol %) system, which suggests that SiH4 evolution mainly proceeds by the i
ndirect reaction of chlorosilanes.