A voltage-sustaining structure with embedded oppositely doped islands is pr
oposed. Due to the compensation of the field induced by these regions, the
doping density of the voltage-sustaining layer can be made larger than that
in a conventional voltage-sustaining layer with the same breakdown voltage
, and therefore the on-voltage can be reduced. The theory of design for suc
h structures is found to be in good agreement with the results of full 2-di
mensional simulation. The on-state performance, the transient behaviour and
the potential applications of this structure in power devices are also dis
cussed.