Modified fabrication process for aperture probe cantilevers

We report the development of cantilever- and fibre-based probes for scannin g near-field optical microscopy. Both probe concepts rely on the integratio n of a microfabricated aperture tip with reproducible optical and mechanica l properties. Numerical calculations were carried out using a finite integr ation code to investigate the polarization-sensitive transmission behaviour of aperture tips. In order to establish technological guidelines for the o ptimization of the properties of the optical tip the distinct influence of the tip geometry on the intensity distribution in the vicinity of the apert ure is studied in detail.