H. Heinzelmann et al., Towards better scanning near-field optical microscopy probes - progress and new developments, J MICROSC O, 194, 1999, pp. 365-368
Several approaches are described with the aim of producing near-field optic
al probes with improved properties. Focused ion beam milling allows the fab
rication of small apertures in a controlled fashion, resulting in probes wi
th excellent polarization properties and increased transmission. Microfabri
cation processes are described that allow the production of apertures of 30
-50 nm, facilitating the mass-fabrication of apertured tip structures that
can be used in a combined force/near-field optical microscope. Finally, pos
sible future developments are outlined.