SEM analysis of oxide thin films and reactions

The determination of orientation relationships between thin oxide films and the underlying single-crystal oxide substrates using electron backscattere d diffraction (EBSD) in scanning electron microscopy (SEM) is discussed. In these well-defined systems, complementary information concerning the local chemistry can be obtained using high-resolution backscattered electron (BS E) imaging. Recent studies have shown the value of using EBSD patterns (EBS Ps) in SEM.