Preparation of nanosized Mo powder by microwave plasma chemical vapor deposition method

In this study, nanosized molybdenum powder was synthesized by the microwave plasma chemical vapor deposition (MPCVD) method, a novel chemical synthesi s technology. The mechanism of the MPCVD process and the effects of some pr ocessing parameters on the characteristics of Mo powder were studied. The r esults show that the mean particle size depends greatly on the output power of microwave, the flow rate of plasma forming gas, the flow rate of the ca rrier gas and the feeding rate of raw materials. The ratio of the flow rate of the carrier gas (K) to the feeding rate of raw materials (V) is the mai n factor that has great influence on the particle size distribution, (C) 19 99 Elsevier Science S.A. All rights reserved.