A design and fabrication of a 3D force sensitive microprobe for surface characterization.

A microprobe device for Scanning Force Microscopy, based on a new design, c apable of differentiation of forces acting in x-, y-, and z-directions is p resented in this paper. The novelty of this device involves both, a new sha pe of the silicon structure and a specific location of the piezoresistors, enabling better separation of the forces and measurement of forces acting i n three dimensions. A FEM simulation of the device, its design, fabrication procedure and achieved results are presented.