Suitability of new polymer materials with adjustable glass temperature fornano-imprinting

A new class of copolymers potentially suitable for an imprint process is in vestigated. They are composed of methyl-methacrylate and a methacrylic acid , where the acid component increases the glass temperature and thus the the rmal stability. The results obtained are compared to previous experiments w ith a methyl/butyl acrylate and the suitability for an imprint process is d iscussed. A modified processing sequence is proposed, where pressure is app lied during the heating phase, resulting in superior imprint quality of, fo r example, periodic patterns.