Heat spike and ballistic contributions to mixing in Si

Authors
Tarus, J Nordlund, K Sillanpaa, J Keinonen, J
Citation
J. Tarus et al., Heat spike and ballistic contributions to mixing in Si, NUCL INST B, 153(1-4), 1999, pp. 378-382
Citations number
17
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences","Instrumentation & Measurement
Journal title
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
ISSN journal
0168583X → ACNP
Volume
153
Issue
1-4
Year of publication
1999
Pages
378 - 382
Database
ISI
SICI code
0168-583X(199906)153:1-4<378:HSABCT>2.0.ZU;2-3
Abstract
We have studied atomic mixing in silicon by the classical molecular dynamic s method, and directly compared the simulated data to experimental measurem ents. The relative importance of ballistic collisions and heat spike to the mixing is considered. We obtain a fairly good agreement between experiment s and simulations. The heat spike contribution to the total mixing seems to be much lower than that of ballistic collisions. (C) 1999 Elsevier Science B.V. All rights reserved.