Study on Lie algebraic deflection aberration theory for combined magnetic focusing-deflection systems

Lie algebraic deflection aberration theory is employed to derive high-order canonical aberrations of combined magnetic focusing-deflection systems. Wi th the aid of the computer symbolic manipulation software MATHEMATICA. all the third- and fifth-order aberrations of the combined systems are feasibly obtained. The present paper lays a groundwork for further studies on highe r-order aberration computation and optimized design for scanning probe syst ems.