Rotating analyzer-fixed analyzer ellipsometer based on null type ellipsometer

The theory and design of an inexpensive rotating analyzer unit is presented , which allows a conventional null type ellipsometer to work as rotating an alyzer-fixed analyzer automatic ellipsometer, without sacrificing the possi bility to work in null mode. The mode switching is performed simply by addi ng or removing the rotating analyzer from its holder. It is shown that the rotating analyzer phase shift in rotating analyzer-fixed analyzer mode can be run-time determined from the measured Fourier coefficients. This avoids any need of recalibration procedure after mode switching and makes unnecess ary plane of incidence synchronization, which further simplifies the needed hardware and reduces the errors connected with the phase shift instability of the output signal. The run-time phase shift calibration procedure and s ubsequent ellipsometric angles determination do not involve normalization o f the output signal Fourier coefficients to the zeroth harmonic, eliminatin g in this way the influence of the dc component time drift. (C) 1999 Americ an Institute of Physics. [S0034-6748(99)01807-9].