Cerium oxide thin films between 1-10 ML thick have been grown in situ on th
e Ru(0001) and Ni(111) surfaces. The films were highly ordered with an orie
ntation determined by the orientation of the substrate on which they were g
rown, as shown by ion scattering spectroscopy and low-energy electron diffr
action. The principal azimuths of the oxide films were aligned parallel to
the principal azimuths of the substrates. The lattice constant of the films
was nominally the same as for CeO2 with a fluorite structure. Optimal film
s were grown by dosing metallic Ce at a rate of ca 3 x 10(14) min(-1) cm(-2
) in an oxygen background while the substrate was at 700 K. Fully oxidized
films could be grown by using an oxygen pressure near 10(-7) Torr, whereas
substoichiometric films could be grown by decreasing the oxygen pressure. T
he fully oxidized films were predominantly terminated by an oxygen layer, w
hereas the substoichiometric films had a significant amount of cerium in th
e top layer. The structure of the reduced oxide films was most consistent w
ith a CeO2(111) surface that contained numerous oxygen vacancies. The films
grown on Ru(0001) were fully stable in terms of structure and composition
at temperatures up to 1000 K. The films grown on Ni(111) lost oxygen upon a
nnealing to 1000 K. (C) 1999 Elsevier Science B.V. All rights reserved.