Tin dioxide sol-gel derived films doped with platinum and antimony deposited on porous silicon

SnO2 sol-gel derived thin films doped simultaneously with Pt and Sb are obt ained and reported for the first time. The Sn sources were tin(IV) ethoxide or tin(II) ethylhexanoate, while hexachloroplatinic acid (H2PtCl6) and ant imony chloride (SbCl3) were used as platinum and antimony sources, respecti vely. Transparent, crack-free layers, deposited on silicon or porous silico n (PS) substrates were obtained with antimony doping in the range (0-2)% M, while the platinum addition was limited to maximum 1% M, due to the strong acidic character of the Pt and Sb precursors. Ternary sol (Pt:Sb:SnO2) sta bility was analysed by viscosity studies while the surface roughness of the doped SnO2 layers on both types of substrates was investigated by atomic f orce microscopy (AFM) measurements. Rutherford Backscattering spectra (RBS) analysis proved that pores of PS substrates had been filled as a result of multiple spin-casting processes. (C) 1999 Elsevier Science S.A. All rights reserved.