Role of adsorbed species on the deposit in the diamond deposition with brominated benzenes as carbon source

Bromobenzenes, C6H5Br and C6H4Br2, were selected as carbon sources for the diamond deposition and were added into the Ar/H-2 plasma jet. The role of t he adsorbed species on the deposit on the substrate placed in the plasma je t on the diamond deposition was investigated with the characterization of t he deposits and identification of the species in the plasma jet and species adsorbed on the surface of the deposit. Well faceted diamond was deposited from the Ar/C6H5BT/H-2 plasma jet and the Ar/C6H4Br2/H-2 plasma jet. As th e comparison of results obtained with the results in the diamond deposition using benzene as carbon source, the interaction of species in the plasma j et with the adsorbed bromine on the surface of the deposit would promote th e diamond deposition reaction like the diamond deposition with chlorobenzen e as carbon source. (C) 1999 Elsevier Science S.A. All rights reserved.