Intensity-modulated moire topography

Citation
Cw. Lu et S. Inokuchi, Intensity-modulated moire topography, APPL OPTICS, 38(19), 1999, pp. 4019-4029
Citations number
17
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Optics & Acoustics
Journal title
APPLIED OPTICS
ISSN journal
00036935 → ACNP
Volume
38
Issue
19
Year of publication
1999
Pages
4019 - 4029
Database
ISI
SICI code
0003-6935(19990701)38:19<4019:IMT>2.0.ZU;2-F
Abstract
Moire topography has the advantage of requiring only a single image to obta in a three-dimensional measurement, but it cannot discern the fringe order. Because there is an ambiguity problem when calculating the depth range by use of hinge intensity or phase unwrapping, it is impossible to obtain an a bsolute phase and an absolute depth range. It is therefore difficult to dis cern the relation between fringes in the cases in which the fringes are dis continuous or the objects are isolated. An intensity-modulated moire topogr aphy method is presented. By modulation of the transmission factors of the projection and the observation gratings by exponential functions a new moir e pattern whose fringe intensity changes with its order can be produced. Th e fringe order can be extracted easily from the fringe intensity, and the a bsolute range of the skeleton line can be obtained solely from its intensit y. At the same time, we can segment the moire pattern by its fringe order. For every segment the absolute phase and the absolute depth range of every point of the moire pattern can be obtained solely from its intensity with n o need for interaction with the user. (C) 1999 Optical Society of America.