Complex refractive-index measurement based on Fresnel's equations and the uses of heterodyne interferometry

The phase difference between s and p polarization of the light reflected fr om a material is used for measuring the material's complex refractive index . First, two phase differences that correspond to two different incidence a ngles are measured by heterodyne interferometry. Then these two phase diffe rences are substituted into Fresnel's equations, and a set of simultaneous equations is obtained. Finally, the equations are solved by use of a person al computer by a numerical analysis technique, and the complex refractive i ndex of the material can be estimated. (C) 1999 Optical Society of America.