Investigation of the thermal conductivity of diamond film on aluminum nitride ceramic

Diamond films were successfully synthesized on aluminum nitride(AlN) cerami c substrates by hot-filament chemical vapor deposition (HFCVD) method. The thermal conductivity of the diamond film/aluminum nitride ceramic (DF/AlN) composites was studied by photothermal deflection (PTD) technique. It has r eached 2.04W/cmK, 73% greater than that of AlN ceramic. Compared with the m easurement of scanning electron microscopy (SEM) and Raman spectroscopy, th e influence of diamond films on the thermal conductivity of the composites was pointed out. The adhesion and the stresses were also studied. The unusu al stability and very good adhesion of the diamond film on AIN ceramic subs trate obtained is attributed to the formation of aluminum carbide.