A new role for e-beam: electron projection

Authors
Harriott, LR
Citation
Lr. Harriott, A new role for e-beam: electron projection, IEEE SPECTR, 36(7), 1999, pp. 41-45
Citations number
6
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
IEEE SPECTRUM
ISSN journal
00189235 → ACNP
Volume
36
Issue
7
Year of publication
1999
Pages
41 - 45
Database
ISI
SICI code
0018-9235(199907)36:7<41:ANRFEE>2.0.ZU;2-Z