Jt. Torvik et al., Comparison of GaN and 6H-SiC p-i-n photodetectors with excellent ultraviolet sensitivity and selectivity, IEEE DEVICE, 46(7), 1999, pp. 1326-1331
We fabricated GaN and 6H-SiC p-i-n photodetectors and compared their electr
ical and optical characteristics. The GaN diodes suffered from significant
leakage current of 37 mu A/mm(2) at -5 V, while the SiC diode leakage curre
nt was below the noise level at 10 pA/mm(2) at -20 V, The built-in potentia
ls and the unintentional "i-layer" doping densities were obtained from capa
citance-voltage (C-V) measurements. The SiC detectors exhibited a broad spe
ctral response in contrast to the abrupt cutoff observed in the GaN detecto
rs. The peak responsivities of the GaN and SiC photodetectors corresponded
to internal quantum efficiencies of 57% at 3.42 eV and 82% at 4.49 eV, resp
ectively. Furthermore, both detectors exhibited excellent visible rejection
ratios which is needed for solar-blind applications. The response times at
zero bias were 18 and 102 ns for the GaN and SIC detectors, respectively.