The change of the chemical composition on a stainless-steel surface depending on the oxygen treatment and the annealing temperature and time, using photoemission spectroscopy

Recent studies have shown that an oxidized vacuum chamber has much better o utgassing characteristics than an unoxidized one. However, the chemical com position of the vacuum chamber surface has not been fully characterized yet . Therefore, we employed photoemission spectroscopy using synchrotron radia tion to study the stainless-steel surface as a function of oxygen exposure and annealing temperature. 143 eV photon energy was used to increase the su rface sensitivity and the intensity of the Fe 3p and Cr 3p. This experiment was done at the 2B1 spherical grating monochromator (SGM) beamline at the Pohang Accelerator Laboratory. (C) 1999 Elsevier Science B.V. All rights re served.