Spectroscopic study of CNx films grown by magnetron sputter deposition

Authors
Guo, JH Zheng, WT Sathe, C Hellgren, N Agui, A Sundgren, JE Nordgren, J
Citation
Jh. Guo et al., Spectroscopic study of CNx films grown by magnetron sputter deposition, J ELEC SPEC, 103, 1999, pp. 551-554
Citations number
12
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences
Journal title
JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA
ISSN journal
03682048 → ACNP
Volume
103
Year of publication
1999
Pages
551 - 554
Database
ISI
SICI code
0368-2048(199906)103:<551:SSOCFG>2.0.ZU;2-I
Abstract
The electronic structure of carbon nitride films has been studied using sof t X-ray absorption and emission spectroscopy. Resonant N K-emission spectra show a strong dependence on excitation photon energies and the substrate t emperatures, while C K-emission band appears insensitive to the different e xcitation photon energies and the substrate temperatures. Two nitrogen site s are assigned to N bonded to sp(3)-hybridized C and to N bonded to sp(2)-h ybridized C. (C) 1999 Elsevier Science B.V. All rights reserved.