R. Franke et al., The determination of structural units in amorphous Si-B-N-C ceramics by means of Si, B, N and CK-XANES spectroscopy, J ELEC SPEC, 103, 1999, pp. 641-645
Citations number
17
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences
Journal title
JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA
X-ray absorption near edge structure (XANES) measurements at the Si, B, N a
nd C K-edges of amorphous Si-B-N-C ceramics were performed to study the loc
al atomic structure. Recorded spectra of samples synthesized by a Si-organo
polymer synthesis route show the presence of (SiN4), (SiNxCy), (BN3), (NSix
By), and (C=C) structural units. The quantitative content of these units de
pends on the chemical constitution of the precursor molecules and the react
ion conditions. (C) 1999 Elsevier Science B.V. All rights reserved.