Vacuum-plasma sprayed nanostructured titanium oxide films

Nanostructured titanium oxide films were fabricated by vacuum-plasma sprayi ng. The microstructure of the films was characterized with SEM, TEM, and XR D. The chemical state of the titanium oxide of the films was analyzed using XPS. The results indicated that the vacuum-plasma sprayed nanostructured t itanium oxide films possessed a corallike structure with small pores and ag glomerated grains, which was composed of nanosized particles. The main phas es of the films were anatase and rutile, and their relative content was det ermined by the plasma parameters. Low-valence titanium cations were also fo und in the films.