In this paper we analyse the extent of grain orientation before and after t
he C49-C54 transformation in TiSi2;?, depending on the substrate microstruc
ture and the lateral dimensions of the film. In the former case, for blanke
t configuration, we make a comparison to the corresponding evolution in sur
face roughness, both by AFM and by light scattering measurements. In the se
cond case, an interpretation of the strong texturing occurring in narrow li
nes, independently of substrate microstructure, is,given on the basis of su
rface energy calculations. (C) 1999 Elsevier Science Ltd. All rights reserv
ed.