Texturing, surface energetics and morphology in the C49-C54 transformationof TiSi2

Citation
L. Miglio et al., Texturing, surface energetics and morphology in the C49-C54 transformationof TiSi2, SOL ST ELEC, 43(6), 1999, pp. 1069-1074
Citations number
5
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Eletrical & Eletronics Engineeing
Journal title
SOLID-STATE ELECTRONICS
ISSN journal
00381101 → ACNP
Volume
43
Issue
6
Year of publication
1999
Pages
1069 - 1074
Database
ISI
SICI code
0038-1101(199906)43:6<1069:TSEAMI>2.0.ZU;2-O
Abstract
In this paper we analyse the extent of grain orientation before and after t he C49-C54 transformation in TiSi2;?, depending on the substrate microstruc ture and the lateral dimensions of the film. In the former case, for blanke t configuration, we make a comparison to the corresponding evolution in sur face roughness, both by AFM and by light scattering measurements. In the se cond case, an interpretation of the strong texturing occurring in narrow li nes, independently of substrate microstructure, is,given on the basis of su rface energy calculations. (C) 1999 Elsevier Science Ltd. All rights reserv ed.