Possibility of nondestructive layer-by-layer analysis of multilayer structures of ultrathin films using low-energy hydrogen ions

Authors
Kurnaev, VA Trifonov, NN Drozdov, MN Salashchenko, NN
Citation
Va. Kurnaev et al., Possibility of nondestructive layer-by-layer analysis of multilayer structures of ultrathin films using low-energy hydrogen ions, TECH PHYS L, 25(6), 1999, pp. 442-443
Citations number
7
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
TECHNICAL PHYSICS LETTERS
ISSN journal
10637850 → ACNP
Volume
25
Issue
6
Year of publication
1999
Pages
442 - 443
Database
ISI
SICI code
1063-7850(199906)25:6<442:PONLAO>2.0.ZU;2-U
Abstract
The possibility of nondestructive monitoring of the distribution of the com position in multilayer structures was investigated experimentally by analyz ing the energy spectra of scattered hydrogen ions. (C) 1999 American Instit ute of Physics. [S1063-7850(99)00906-4].