We investigated point defects and dopant atoms in (11 (2) over bar 0) and (
10 (1) over bar 0) cleavage surfaces of CdSe using atomically resolved scan
ning tunneling microscopy images. Positively charged dopant atoms give rise
to elevations of up to 5 nm in diameter in the empty and occupied state im
ages. Uncharged Se and Cd Vacancies exhibit an isolated missing occupied an
d empty dangling bond, respectively. In CdS (10 (1) over bar 0) surfaces we
observed In dopant atoms and accepters. On the basis of the observed defec
ts and dopant atoms and their concentrations the origin of the electrical c
ompensation is discussed. (C) 1999 Elsevier Science S.A. AII rights reserve
d.