Structural analysis of epitaxial TiAg MgO superlattices prepared by multi-evaporation

Metal/insulator multilayers composed of Ti1-xAgx (0.26 < x < 0.54) alloy an d MgO were prepared on MgO(001) substrates at 273 K by electron beam evapor ation in ultrahigh vacuum. Ti-Ag alloy layers in the superlattices were dep osited using two E-guns of Ti and AE simultaneously, at the various deposit ion rates. X-ray diffraction and transmission electron microscopic measurem ents revealed that TiAg/MgO multilayers were epitaxially grown superlattice and that Ti-Ag in the superlattices were tetragonal or cubic structures. A fter I h heating at 573 K the X-ray diffraction pattern in low angle region showed superlattice structures, but the modulating wavelengths of the supe rlattice were found to be smaller than those of as-grown superlattices. (C) 1999 Elsevier Science S.A. All rights reserved.