Nanoscale measurements for computing Young's modulus with atomic force microscope

Atomic force microscope (AFM), developed at Central Scientific Instruments Organization, Chandigarh, has been configured for load-depth indentation me asurements, wherein 'the reverse path effect' of AFM force curve associated with the use of piezo actuators has been overcome by measuring in situ act uator displacement independently by a laser Doppler displacement meter (LDD M) to enable correction of the force curves. The measurements of elastic mo duli of highly oriented pyrolytic graphite, silicone elastomer, mica and ga llium arsenide have been carried out.