EXPERIMENTAL AND THEORETICAL-STUDY OF COR RELATED ENERGETIC AND ANGULAR-DISTRIBUTIONS OF ELECTRONS BACKSCATTERED BY GOLD AND SILICON TARGETIN A SCANNING ELECTRON-MICROSCOPE

An original device, previously described [1,2] allows to determine the fraction of normally incident electron beam on a bulk specimen that i s backscattered in a given direction theta, with an energy E less than or equal to the incident energy E-0. We have deduced from the experim ental results the different angular and energetic distributions of bac kscattered electrons; in certain cases, a normalisation of these distr ibutions is performed. So, we show off properties of the backscatterin g phenomenon that ase independent of the target material and of the en ergy range under study. The last part presents the results of Monte-Ca rlo simulation. Their comparison with the experimental results allows to validate this model.