By performing electron energy loss spectroscopy (EELS) in a scanning transm
ission electron microscope (STEM) it is possible to obtain atomic spatial r
esolution spectra from individual defects. Using the multiple scattering me
thodology originally developed for X-ray absorption Near-Edge Structure (XA
NES), the fine-structure of the energy loss spectra can be directly related
to the local 3-dimensional atomic structure. This type of analysis allows
unique structure models to be developed for defects, on which a fundamental
understanding of the structure-property relationships can be based. The ap
plication of this technique is demonstrated here for a 25 degrees [001] til
t grain boundary in SrTiO3.