Radiation-induced degradation of polydiene sulfones as obtained by sulfur K-edge XANES

Authors
Modrow, H Calderon, G Daly, WH de Souza, GGB Tittsworth, RC Moelders, N Schilling, PJ
Citation
H. Modrow et al., Radiation-induced degradation of polydiene sulfones as obtained by sulfur K-edge XANES, J SYNCHROTR, 6, 1999, pp. 588-590
Citations number
10
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
JOURNAL OF SYNCHROTRON RADIATION
ISSN journal
09090495 → ACNP
Volume
6
Year of publication
1999
Part
3
Pages
588 - 590
Database
ISI
SICI code
0909-0495(19990501)6:<588:RDOPSA>2.0.ZU;2-K
Abstract
Poly(hexadiene-1,3 sulfone), PHS, is a polymer which has demonstrated poten tial as an X-ray resist material for microfabrication based on X-ray lithog raphy. Sulfur K-edge XANES measurements were performed on PHS after various dosages of exposure to synchrotron-generated X-rays to assess the role of sulfur atoms in the degradation. The effects of irradiation are assessed an d compared to those in poly(butene-1 sulfone), PBS, a commercially used e-b eam resist.