Nanosized ceramic powders (Cu/SiC, Y2O3-stabilized cubic ZrO2) were produce
d by evaporation of coarsely grained powders of the respective materials in
an inductively coupled thermal plasma process and rapid quenching of the v
apor. The atomic short range order of these nanoparticles with an average d
iameter of about 10 nm was investigated ex situ with EXAFS. The results are
compared to crystalline reference materials.