Determination of empirical relationship between vapor and solid phase composition of GaInAsP in MOVPE

Authors
Oh, DK Pyun, KE Kim, HS Choi, IH
Citation
Dk. Oh et al., Determination of empirical relationship between vapor and solid phase composition of GaInAsP in MOVPE, J KOR PHYS, 34, 1999, pp. S455-S457
Citations number
9
Categorie Soggetti
Physics
Journal title
JOURNAL OF THE KOREAN PHYSICAL SOCIETY
ISSN journal
03744884 → ACNP
Volume
34
Year of publication
1999
Supplement
S
Pages
S455 - S457
Database
ISI
SICI code
0374-4884(199906)34:<S455:DOERBV>2.0.ZU;2-I
Abstract
GaInAsP (lambda = 1.05 similar to 1.55 mu m) lattice matched to InP were su ccessfully grown by using a LP-MOVPE. The As solid composition with the AsH 3 gas composition shows the non-linear relation, and the As distribution co efficient is severely affected by the amount of Ga while Ga distribution co efficient is not affected by group V. From the analytical fitting between w avelength and gas composition, input gas composition in MOVPE can be exactl y estimated for designed wavelength of GaInAsP.