Nanostructuring with spatially localized femtosecond laser pulses

Authors
Nolte, S Chichkov, BN Welling, H Shani, Y Lieberman, K Terkel, H
Citation
S. Nolte et al., Nanostructuring with spatially localized femtosecond laser pulses, OPTICS LETT, 24(13), 1999, pp. 914-916
Citations number
22
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Optics & Acoustics
Journal title
OPTICS LETTERS
ISSN journal
01469592 → ACNP
Volume
24
Issue
13
Year of publication
1999
Pages
914 - 916
Database
ISI
SICI code
0146-9592(19990701)24:13<914:NWSLFL>2.0.ZU;2-Y
Abstract
Spatially localized femtosecond pulses have been produced by a combination of scanning near-field optical microscopy with ultrashort pulse lasers. Wit h these pulses direct ablative writing on metal surfaces is demonstrated. P ossible applications of this technique for nanostructuring, repair, and pro duction of lithographic masks are discussed. (C) 1999 Optical Society of Am erica OCIS codes: 140.7090, 180.5810, 220.4000.