Role of low-energy electrons in Ar emission from low-pressure radio frequency discharge plasma

Authors
Moshkalyov, SA Steen, PG Gomez, S Graham, WG
Citation
Sa. Moshkalyov et al., Role of low-energy electrons in Ar emission from low-pressure radio frequency discharge plasma, APPL PHYS L, 75(3), 1999, pp. 328-330
Citations number
14
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
APPLIED PHYSICS LETTERS
ISSN journal
00036951 → ACNP
Volume
75
Issue
3
Year of publication
1999
Pages
328 - 330
Database
ISI
SICI code
0003-6951(19990719)75:3<328:ROLEIA>2.0.ZU;2-E
Abstract
Optical emission spectra from a low-pressure Ar plasma were studied with hi gh spatial resolution. It has been shown that the intensity ratios of Ar li nes excited through metastable levels to those excited directly from the gr ound state are sensitive to the shape of electron energy distribution funct ion. From these measurements, important information on the spatial variatio n of plasma parameters can be obtained. (C) 1999 American Institute of Phys ics. [S0003-6951(99)01629-0].