Preparation and characterization of MgO thin films by a simple nebulized spray pyrolysis technique

A simple nebulized spray pyrolysis method has been applied to prepare MgO t hin films with (200) preferential orientation on (100) Si substrates by usi ng magnesium acetate as starting reactants. The experimental results reveal ed that the substrates temperature and the oxygen flow played important rol es in the formation of (200) oriented MgO film. The surface morphology and some properties of the prepared MgO thin films were examined by atomic forc e microscopy, transmission electron microscopy, X-ray diffraction and sprea d resistance processing technique. (C) 1999 Elsevier Science B.V. All right s reserved.