The structure of TiOx thin films have been studied by Raman spectroscopy. T
he spectra show that in the film plane, the atoms are connected in a way si
milar to that of bulk anatase. Due to the dimensional limitation, the stret
ching modes normal to the film plane, A1g + B1g (nu(3) + nu(2)), are suppre
ssed. The dependence of this suppression on the calcination temperature and
film thickness has also been investigated. (C) 1999 Published by Elsevier
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