Recent studies of charge trapping and charge transport in polymer films irr
adiated and charged with monoenergetic electrons of range smaller than the
sample thickness and thereafter stored or annealed under various conditions
are discussed. An analytical model used to describe the phenomena takes th
e following parameters into consideration: Charge and energy deposition pro
files, charge drift due to a shallow-trap-modulated mobility, deep trapping
without release, trap filling due to a finite trap density, and ohmic rela
xation due to a radiation-induced conductivity during irradiation and its d
elayed component after irradiation. The model calculations show the effect
of various parameters on the shape of the initial charge distribution and o
n its evolution with annealing time. - Experiments with, the laser-induced
pressure-pulse (LIPP) method on 12 and 25 mu m thick fluorocarbon and polyi
mide films, charged with 10 or 20 keV electron beams, respectively, yield t
he charge distributions after irradiation and the changes of the distributi
ons due to annealing of the samples at 120 degrees C for various times. A c
omparison of experimental and analytical results reveals the trapping kinet
ics and permits to estimate the deep-trap density and the mu tau-product, w
here mu is the trap-modulated mobility and tau is the trapping time.