Electromigration in Al thin films induced by surface acoustic waves: Application to imaging

Citation
R. Tucoulou et al., Electromigration in Al thin films induced by surface acoustic waves: Application to imaging, IEEE ULTRAS, 46(4), 1999, pp. 856-860
Citations number
16
Categorie Soggetti
Optics & Acoustics
Journal title
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL
ISSN journal
08853010 → ACNP
Volume
46
Issue
4
Year of publication
1999
Pages
856 - 860
Database
ISI
SICI code
0885-3010(199907)46:4<856:EIATFI>2.0.ZU;2-6
Abstract
The propagation of a high amplitude surface acoustic wave in an Al thin fil m induces a large-scale electromigration phenomenon resulting in a permanen t etching of the acoustic field in the film. The etched patterns depend on the time of propagation and on the acoustic characteristics. Preliminary ob servations of a few grooved structures in Al films have been performed by d ifferent techniques. A first explanation of this phenomenon based on dynami cal Grinfeld instabilities is proposed. By providing permanent pictures of acoustic fields emitted by transducers, this effect could be used to perform imaging of surface acoustic wave propa gation.