An ultra-precision XY theta(Z) piezo-micropositioner - Part I: Design and analysis

A novel three degree-of-freedom micropositioner was developed for deep ultr aviolet lithography applications. The design of the micropositioner utilize s the monolithic flexural mechanism with the built-in multilayer piezoelect ric actuators and the sensors to achieve the translations in the X- and Y-a xes and rotation in the theta(z)-axis. The compact design aims at high reso lution, high stiffness, and extremely low crosstalk interference. Parametri c analyses of harmonic and forced vibrations are conducted to solve the der ived dynamic models for the near optimum geometry of the micropositioner. F urthermore, the error budget analysis is conducted to minimize the effects of the geometric tolerance, material variation, and hysteresis errors.