The elastic modulus of thin him ZnO has been measured by attaching a Si-ZnO
strip to a ceramic bimorph, deflecting the latter with an electric signal,
and measuring the resonance frequencies of the Si-ZnO strip. The resonance
frequencies of the Si-ZnO strip depend on the properties of both Si and Zn
O. The properties of Si are known, and, thus, the elastic modulus of thin f
ilm ZnO can be calculated from the resonance frequency of the beam. The res
ults we obtained are presented in this report.