Measurement of elastic modulus s(11)(D) of thin film ZnO by resonance method

Authors
Jade, SA Smits, JG
Citation
Sa. Jade et Jg. Smits, Measurement of elastic modulus s(11)(D) of thin film ZnO by resonance method, IEEE ULTRAS, 46(4), 1999, pp. 768-770
Citations number
9
Categorie Soggetti
Optics & Acoustics
Journal title
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL
ISSN journal
08853010 → ACNP
Volume
46
Issue
4
Year of publication
1999
Pages
768 - 770
Database
ISI
SICI code
0885-3010(199907)46:4<768:MOEMSO>2.0.ZU;2-#
Abstract
The elastic modulus of thin him ZnO has been measured by attaching a Si-ZnO strip to a ceramic bimorph, deflecting the latter with an electric signal, and measuring the resonance frequencies of the Si-ZnO strip. The resonance frequencies of the Si-ZnO strip depend on the properties of both Si and Zn O. The properties of Si are known, and, thus, the elastic modulus of thin f ilm ZnO can be calculated from the resonance frequency of the beam. The res ults we obtained are presented in this report.