Decomposition of methane and carbon dioxide in a radio-frequency discharge

An experimental study of the decomposition of methane and carbon dioxide us ing capacitive RF discharge was investigated over a moderate range of press ures (5-60 Torr). The decomposition of methane and carbon dioxide molecules is caused by direct electron collision via excitation of the unstable elec tronic state. Mechanisms of dissociation of methane and carbon dioxide by e lectron impact were proposed and the conversions of each gas were derived f rom the proposed mechanisms. As a result, the conversion of each gas only d epended on the specific energy of the molecules. The energy costs for the d ecomposition of methane and carbon dioxide could be determined through the experimental data. The major gaseous products of the decomposition of metha ne were hydrogen and C-2 and/or C-3 compounds. In the case of methane, some different reaction mechanisms were observed on the range of input power, a nd a small amount of film deposition inside the reactor by polymerization w as observed at high input power. Carbon monoxide was mainly produced from t he decomposition of carbon dioxide.