Microstructure and orientation relations of BaTiO3/MgO/YSZ multilayers deposited on Si(001) substrates by laser ablation

The microstructure and crystallographic relations in BaTiO3/MgO/YSZ multila yer films deposited on Si(0 0 1) substrate are investigated by means of tra nsmission electron microscopy. On Si(0 0 1) substrate the YSZ layer grows e pitaxially with a cubic-to-cubic orientation relationship. The MgO layer is columnar-grained and exhibits a common orientation with a { 1 1 1 } plane of the grains parallel to the film surface. the in-plane orientations of th ese grains lead to a general orientation relationship with respect to the Y SZ layer: [1 1 (2) over bar](MgO)parallel to[1 0 0](YSZ), [(1) over bar 1 0 ](MgO)parallel to[0 1 0](YSZ). With a cubic-to-cubic orientation relationsh ip, the BaTiO3 layer shows the same grain morphology as the MgO layer. Thes e crystallographic relations between the different layers are discussed con sidering the lattice match and atomic environments across the interfaces. ( C) 1999 Elsevier Science B.V. All rights reserved.