Fabrication and characterization of integrated optical waveguides in sulfide chalcogenide glasses

This paper reports on the fabrication process of As-S-(Se)-based chalcogeni de glass optical waveguides using three techniques: photolithography, laser beam writing, and ion implantation. The fabrication method of the bulk sul fide glasses and the processing of integrated devices are described and ass essed in light of the propagation characteristics and optical losses in eac h case.