SrTiO3 film fabrication and powder synthesis from a non-polymerized precursor system of a stable Ti(IV) complex and Sr(II) salt of edta

Fabrication of SrTiO3 thin films on quartz glass and Si(100) single crystal substrates was achieved by firing an adhered precursor at 600 degrees C in air. The precursor ethanolic solution was prepared by mixing ethanol solut ions of a Ti(IV) complex and of an Sr(II) salt of edta in the presence of d ibutylamine. The solution of the Ti(IV) complex was prepared by reaction of neutral [Ti(H2O) (edta)] with dibutylamine and 4-(N,N-dimethylamino)pyridi ne (DMAP) in ethanol. The solution containing Sr(II) was obtained by reacti on of Sr(H(2)edta). 3H(2)O with dibutylamine in ethanol. It was elucidated by XRD that perovskite-type SrTiO3 film formation was attainable by employi ng the mixed precursor derived from the stable Ti(IV) metal complex and Sr( II) salt, with no evidence for polymerization. A facile preparation for the precursor ethanolic solution and the properties of the precursor powder el ucidated by evaporation of the precursor solution are also reported, along with the optical properties of a thin film on quartz glass.