CMOS integrated pressure sensor optimization using electrical network simulator-FEM tool coupling

The electrical network simulator HSPICE and the FEM (finite element method) program ANSYS were coupled. The coupled programs can be used for the effec tive design of many types of microsystem. The coupling permits the optimiza tion of geometrical, mechanical or electrical design parameters of a monoli thically integrated sensor at the same time. For the demonstration of the u sefulness of the coupling, a gauge pressure sensor fabricated with an on-ch ip integrated VCO (voltage controlled oscillator) was simulated and the des ign was optimized using ANSYS optimization tools.